US 12,234,828 B2
Vacuum pump and vacuum pump rotor blade
Takashi Kabasawa, Chiba (JP); and Kengo Saegusa, Chiba (JP)
Assigned to Edwards Japan Limited, Chiba (JP)
Appl. No. 18/004,989
Filed by Edwards Japan Limited, Chiba (JP)
PCT Filed Jul. 30, 2021, PCT No. PCT/JP2021/028255
§ 371(c)(1), (2) Date Jan. 10, 2023,
PCT Pub. No. WO2022/030374, PCT Pub. Date Feb. 10, 2022.
Claims priority of application No. 2020-135415 (JP), filed on Aug. 7, 2020.
Prior Publication US 2023/0250826 A1, Aug. 10, 2023
Int. Cl. F04D 19/04 (2006.01); F04D 27/00 (2006.01); F04D 29/02 (2006.01); F04D 29/32 (2006.01); F04D 29/58 (2006.01)
CPC F04D 19/042 (2013.01) [F04D 19/04 (2013.01); F04D 19/044 (2013.01); F04D 19/048 (2013.01); F04D 27/001 (2013.01); F04D 29/023 (2013.01); F04D 29/321 (2013.01); F04D 29/5853 (2013.01); F05C 2201/0412 (2013.01); F05C 2201/0466 (2013.01); F05C 2203/08 (2013.01); F05C 2251/048 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A vacuum pump comprising:
a rotating shaft held rotationally;
a drive mechanism for the rotating shaft;
a first rotor blade made of a first material and forming a turbomolecular pump mechanism;
a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, the second rotor blade forming a drag pump mechanism; and
a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade, wherein
the second rotor blade is disposed, via a cylindrical heat insulating portion extending in an axial direction and disposed on an inside of the first rotor blade in a radial direction, on at least one of the rotating shaft or the first rotor blade, the heat insulating portion has a smaller thickness than a thickness in the radial direction of an upstream portion of the second rotor blade, and
an outermost radial position at which a portion continuously connecting from the heat insulating portion upward contacts the at least one of the rotating shaft or the first rotor blade is located radially inward from an outer circumference of the heat insulating portion.