| CPC C30B 25/20 (2013.01) [C23C 16/006 (2013.01); C23C 16/02 (2013.01); C23C 16/27 (2013.01); C23C 16/56 (2013.01); C30B 25/16 (2013.01); C30B 25/186 (2013.01); C30B 25/205 (2013.01); C30B 29/04 (2013.01); C30B 29/68 (2013.01); C30B 33/00 (2013.01)] | 17 Claims |

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1. A diamond composite body comprising:
a first single crystal diamond layer, the first single crystal diamond layer having an NV− concentration of at least 0.3 ppm and a uniform strain, such that over an area of at least 1×1 mm, at least 90 percent of points display a modulus of strain-induced shift of NV resonance of less than 200 kHz, wherein each point in the area is a resolved region of 50 μm2; and
a second single crystal diamond layer having an NV− concentration less than or equal to 10 times lower than the NV− concentration in the first diamond layer.
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