| CPC C23C 14/54 (2013.01) [C23C 16/52 (2013.01); G01B 11/0616 (2013.01); G02B 1/115 (2013.01); G02B 27/0012 (2013.01)] | 18 Claims |
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1. A method for producing a layer system, comprising:
operating at least one coating installation to produce a layer system for optical elements, the produced layer system consisting of one or more single layers, each with an installation actual layer thickness of the respective single layer, wherein the one or more single layers are produced according to an installation data set of the at least one coating installation, wherein the installation data set comprises at least the installation actual layer thickness of the respective single layer of the one or more single layers;
performing an automatic process including:
detecting, by an optical measurement device, at least one spectral measurement curve with ordinate values and abscissa values as actual measurement curve on the produced layer system;
associating, by a simulation computer, the actual measurement curve of the actual layer system according to at least one association criterion to a target measurement curve of a target data set with ordinate values and abscissa values, which is based on a target data set layer system formed from one or more single layers, wherein the target data set comprises at least one known target layer thickness of the respective single layer of the one or more single layers;
generating, by the simulation computer, a simulation actual measurement curve according to an iterative method by varying at least one simulation actual layer thickness of the respective single layer in at least one spectral interval of the actual measurement curve and obtaining a final simulation actual data set with at least one final simulation actual layer thickness of the respective single layer of the one or more single layers, by which the actual measurement curve is at least being approximated in the simulation actual measurement curve until a termination criterion is reached, wherein the simulation actual measurement curve is generated from the actual measurement curve and the target data set comprising the at least one known target layer thickness of the respective single layer of the one or more single layers;
generating, by the simulation computer a simulation target measurement curve according to an iterative method by varying at least a simulation target layer thickness of the respective single layer in at least one spectral interval of the target measurement curve and obtaining a final simulation target data set with at least one final simulation target layer thickness of the respective single layer of the one or more single layers, by which the target measurement curve is at least being approximated in the simulation target measurement curve until a termination criterion is reached, wherein optical differences between the actual measurement curve and the simulation actual measurement curve are correlated and the final simulation actual data set is used for calculation of the simulation target measurement curve to match with the target measurement curve, wherein the simulation target measurement curve is generated from the target measurement curve and the final simulation actual data set with the at least one final simulation actual layer thickness of the respective single layer of the one or more single layers; and
sending the final simulation target data set to the at least one coating installation as new installation data set; and
operating the at least one coating installation to produce an optical element by coating a further layer system on a substrate with at least one correction actual layer thickness as new installation actual layer thickness of the respective single layer, which are being determined from the final simulation target layer thickness of the respective single layer of the one or more single layers with the final simulation target data set.
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