US 12,234,542 B2
Sputter desposition system
Filip Delport, Diepenbeek (BE); Hana Fejtova, Deinze (BE); Tomas Fejt, Prague (CZ); and Rudolf Roskovsky, Prague (CZ)
Assigned to FOX BIOSYSTEMS NV, Diepenbeek (BE)
Appl. No. 18/016,969
Filed by FOX BIOSYSTEMS NV, Diepenbeek (BE)
PCT Filed Jul. 23, 2021, PCT No. PCT/EP2021/070734
§ 371(c)(1), (2) Date Jan. 19, 2023,
PCT Pub. No. WO2022/018282, PCT Pub. Date Jan. 27, 2022.
Claims priority of application No. 20187737 (EP), filed on Jul. 24, 2020.
Prior Publication US 2023/0287558 A1, Sep. 14, 2023
Int. Cl. C23C 14/34 (2006.01); C23C 14/50 (2006.01)
CPC C23C 14/34 (2013.01) [C23C 14/505 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A sputter deposition system for depositing at least one film on one or more substrates, the sputter deposition system comprising:
a sputter chamber equipped with a rotatable substrate holder for holding the one or more substrates,
wherein:
the rotatable substrate holder is configured to hold the one or more substrates and to allow rotation of the one or more substrates around their own axis and around a rotation axis of the rotatable substrate holder;
the rotatable substrate holder comprises a bearing assembly comprising an outer ring and an inner ring; and
the bearing assembly is configured so that the one or more substrates are bearing or bearings of the bearing assembly.