US 12,234,540 B2
Mask, mask device and mask design method
Tong Niu, Beijing (CN); Fengli Ji, Beijing (CN); Jianpeng Wu, Beijing (CN); and Sen Du, Beijing (CN)
Assigned to Chengdu BOE Optoelectronics Technology Co., Ltd., Sichuan (CN); and BOE Technology Group Co., Ltd., Beijing (CN)
Appl. No. 17/255,580
Filed by CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Sichuan (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed May 27, 2020, PCT No. PCT/CN2020/092531
§ 371(c)(1), (2) Date Dec. 23, 2020,
PCT Pub. No. WO2021/036372, PCT Pub. Date Mar. 4, 2021.
Claims priority of application No. 201910801463.0 (CN), filed on Aug. 28, 2019.
Prior Publication US 2021/0371966 A1, Dec. 2, 2021
Int. Cl. C23C 14/04 (2006.01); G06F 30/20 (2020.01); H10K 71/00 (2023.01); H10K 71/16 (2023.01)
CPC C23C 14/042 (2013.01) [G06F 30/20 (2020.01); H10K 71/00 (2023.02); H10K 71/166 (2023.02)] 14 Claims
OG exemplary drawing
 
1. A mask, comprising:
a pattern area, wherein the pattern area comprises a plurality of openings, among which adjacent openings are spaced apart by a first rib, and at least one of the plurality of openings has a non-straight side comprising two straight sections and a recess section, two first straight sides connected with the non-straight side, and a second straight side that is located on an opposite side of the non-straight side and is connected with the first straight sides; and
a second rib located at an edge of the pattern area, wherein the second rib is provided with a cutout for compensating for stretch deformation of the non-straight side, extending lines of the two first straight sides extending toward the second rib along a first direction intersect with the second rib to obtain a first area, and the cutout is located at least within the first area, wherein the first direction is parallel to the first straight side, and a second direction perpendicular to the first direction is parallel to the second straight side; and
wherein the recess section is recessed toward inner side of the opening relative to the straight sections, both ends of the recess section are respectively connected to the two straight sections, and a length of the cutout located in the second rib in the second direction is less than a full length of the non-straight side in the second direction, and greater than a length of only the recess section in the second direction; and a shape of the cutout is a crescent shape, and a raised direction of two circular arc edges of the crescent shape is opposite to a recessed direction of the recess section.