US 12,234,399 B2
Chemical solution, method for manufacturing chemical solution, and method for treating substrate
Nobuaki Sugimura, Shizuoka (JP); Tomonori Takahashi, Shizuoka (JP); Hiroyuki Seki, Shizuoka (JP); and Atsushi Mizutani, Shizuoka (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Jun. 27, 2023, as Appl. No. 18/341,929.
Application 18/341,929 is a division of application No. 16/940,515, filed on Jul. 28, 2020, granted, now 11,732,190.
Application 16/940,515 is a continuation of application No. PCT/JP2019/001452, filed on Jan. 18, 2019.
Claims priority of application No. 2018-018459 (JP), filed on Feb. 5, 2018; and application No. 2018-160719 (JP), filed on Aug. 29, 2018.
Prior Publication US 2023/0340326 A1, Oct. 26, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. C09K 13/04 (2006.01); H01L 21/02 (2006.01); H01L 21/3213 (2006.01)
CPC C09K 13/04 (2013.01) [H01L 21/02071 (2013.01); H01L 21/32134 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A method for manufacturing a chemical solution, comprising:
a step A of performing an ion exchange method on a substance to be purified, which includes one or more kinds of periodic acids selected from the group consisting of a periodic acid and a salt thereof, one or more kinds of first metal components selected from the group consisting of Ti and Zr, and water, so as to obtain the chemical solution,
wherein the chemical solution comprises:
one or more kinds of periodic acids selected from the group consisting of a periodic acid and a salt thereof;
one or more kinds of first metal components selected from the group consisting of Ti and Zr; and
water,
in a case where the chemical solution includes one kind of first metal component, a content of the one kind of first metal component is 1 ppt by mass to 100 ppm by mass with respect to a total mass of the periodic acids in the chemical solution, and
in a case where the chemical solution includes two kinds of first metal components, a content of both the two kinds of first metal components is equal to or smaller than 100 ppm by mass with respect to the total mass of the periodic acids in the chemical solution, and a content of at least one of the two kinds of first metal components is equal to or greater than 1 ppt by mass with respect to the total mass of the periodic acids in the chemical solution, and
wherein the pH of the chemical solution is 6.8 to 10.0.