CPC C09G 1/02 (2013.01) [H01L 21/3212 (2013.01)] | 20 Claims |
1. A chemical mechanical polishing composition comprising:
at least one ceria-coated inorganic oxide particles;
at least one silicone-containing compound comprising at least one selected from the group consisting of at least one ethylene oxide and propylene oxide (EO-PO) group, and at least one substituted ethylene diamine group;
at least one non-ionic organic molecule having at least two hydroxyl functional groups;
solvent;
optionally,
a biocide; and
pH adjuster,
wherein
the composition has a pH of 3 to 10, or 4 to 9; and
the at least one silicone-containing compound has a general molecular structure selected from the group consisting of:
![]() wherein
a and a′ each is independently ranged from 0 to 50, or 0 to 20; wherein at least one of a and a′ is not 0;
b and c each is independently ranged from 0 to 50, or 0 to 20; wherein at least one of b and c is not 0;
n and m can be the same or different, and each is independently ranged from 1 to 12, or 1 to 5;
R and R′ can be the same or different, and each is independently selected from the group consisting of hydrogen; —(CH2)pCH3 with p ranged from 1 to 12 or 2 to 5; —NH2; —NH(CH2)q—NH2 with q ranged from 1 to 12 or from 2 to 5; ethylene oxide (EO) and propylene oxide (PO) repeating group -(EO)e—(PO)d—OH with d and e each independently selected from the group consisting of from 1 to 50, 1 to 40, 1 to 30, 1 to 20, 1 to 10, and 1 to 5; —COOH; —COOM; —COOR1; —R1COOH; —R1COOM; —R1COOR2; —SO3H; —SO3M; —R1SO3H; phosphonic acid;
phosphate salt selected from sodium, potassium or ammonium salts; benzyl; di-benzyl;
wherein R1 and R2 each is independently selected from the group consisting of —(CH2) m with m ranged from 1 to 12, and —(C6H4)n with n ranged from 1 to 4; and M is selected from the group consisting of sodium, potassium, and ammonium;
![]() wherein
a is ranged from 0 to 50, or 0 to 20;
e and d can be the same or different, and each is independently ranged from 1 to 12;
![]() wherein
R′ and R″ can be the same or different, and each is independently selected from the group consisting of hydrogen; —(CH2)pCH3 with p ranged from 1 to 12 or 2 to 5; —NH2; —NH(CH2)q—NH2 with q ranged from 1 to 12 or from 2 to 5; ethylene oxide (EO) and propylene oxide (PO) repeating group -(EO)e—(PO)d—OH with d and e each independently selected from the group consisting of from 1 to 50, 1 to 40, 1 to 30, 1 to 20, 1 to 10, and 1 to 5; —COOH; —COOM; —COOR1; —R1COOH; —R1COOM; —R1COOR2; —SO3H; —SO3M; —R1SO3H; phosphonic acid; phosphate salt selected from sodium, potassium or ammonium salts; benzyl; di-benzyl; wherein R1 and R2 each is independently selected from the group consisting of —(CH2)m with m ranged from 1 to 12, and —(C6H4)n with n ranged from 1 to 4; and M is selected from the group consisting of sodium, potassium, and ammonium; and
x, y, and z can be the same or different, and each is independently selected from 1 to 12; n−1 is from 2 to 13;
and
(4) combinations of (1), (2) and (3).
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