	US 12,234,144 B2
	Method for sealing cavities using membranes
Thierry Salvetat, Grenoble (FR); Bruno Ghyselen, Seyssinet-Pariset (FR); Lamine Benaissa, Grenoble (FR); Caroline Coutier, Grenoble (FR); and Gweltaz Gaudin, Crolles (FR)
Assigned to COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR); and SOITEC, Bernin (FR)
Appl. No. 17/637,040
Filed by COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR); and SOITEC, Bernin (FR)
PCT Filed Aug. 18, 2020, PCT No. PCT/FR2020/051476 § 371(c)(1), (2) Date Feb. 21, 2022, PCT Pub. No. WO2021/032927, PCT Pub. Date Feb. 25, 2021.
Claims priority of application No. 1909318 (FR), filed on Aug. 21, 2019.
Prior Publication US 2022/0298007 A1, Sep. 22, 2022
Int. Cl. B81C 1/00 (2006.01); B81B 7/04 (2006.01)

CPC B81C 1/00182 (2013.01) [B81B 7/04 (2013.01); B81B 2201/0271 (2013.01); B81B 2207/053 (2013.01); B81C 2201/0191 (2013.01)]

18 Claims

1. A method for sealing a plurality of cavities using a plurality of membranes, the method comprising:

(a) forming a plurality of cavities opening at a front face of a support substrate or at a sealing face of a sealing film, wherein the cavities are arranged in a matrix, have a depth p, have a characteristic dimension a, and are spaced apart by a spacing distance b; and

(b) forming a plurality of membranes, sealing each of the cavities, by transferring the sealing film overlapping with the front face, the transferring comprising assembling the sealing face with the front face,

wherein the method further comprises a step (a1), executed before step (b), of forming a first contour on at least one of the front face and the sealing face, the first contour comprising a continuous first trench having a width L and a first depth p1, the formation of the first contour being executed such that, after step (b), the plurality of cavities is circumscribed by the first contour, said first contour being at an essentially constant distance G from the plurality of cavities, with G being between b/5 and 5b.