	US 12,234,143 B2
	Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel
Wouter Sparreboom, Ruurlo (NL); Jarno Groenesteijn, Ruurlo (NL); Jack Herman Van Putten, Ruurlo (NL); Meint Jelle De Boer, Ruurlo (NL); Remco John Wiegerink, Ruurlo (NL); Henk-Willem Veltkamp, Ruurlo (NL); Qihui Yu, Ruurlo (NL); Mahdieh Yariesbouei, Ruurlo (NL); Miguel A. Rodriguez Olguin, Ruurlo (NL); and Joost Conrad Lötters, Ruurlo (NL)
Assigned to BERKIN B.V., Ruurlo (NL)
Appl. No. 17/642,362
Filed by BERKIN B.V., Ruurlo (NL)
PCT Filed Sep. 18, 2020, PCT No. PCT/NL2020/050578 § 371(c)(1), (2) Date Mar. 11, 2022, PCT Pub. No. WO2021/054829, PCT Pub. Date Mar. 25, 2021.
Claims priority of application No. 2023872 (NL), filed on Sep. 20, 2019.
Prior Publication US 2022/0324701 A1, Oct. 13, 2022
Int. Cl. B81C 1/00 (2006.01); G01F 1/84 (2006.01); G01N 9/32 (2006.01)

CPC B81C 1/00119 (2013.01) [G01F 1/8445 (2013.01); G01N 9/32 (2013.01); B81B 2201/0214 (2013.01); B81B 2201/058 (2013.01); B81B 2203/0338 (2013.01)]

21 Claims

1. A microelectromechanical system component or microfluidic component comprising a free-hanging or free-standing, non-permeable microchannel, wherein the microchannel has a substantially circular cross-section, wherein the diameter of the microchannel is at least 10 times the thickness of the microchannel wall and the diameter of the microchannel is at least 20 μm.