| CPC B65G 47/92 (2013.01) [H02K 41/031 (2013.01)] | 20 Claims |
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1. An apparatus for transferring a substrate comprising:
a stator assembly including a driving surface and an electromagnetic generating module;
a first mover including a first magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a first inclined surface;
a second mover including a second magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a second inclined surface; and
a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface according to a distance between the first mover and the second mover.
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