US 12,234,094 B2
Substrate holder and substrate processing apparatus
Koichi Shimada, Iwate (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jul. 8, 2022, as Appl. No. 17/811,373.
Claims priority of application No. 2021-119079 (JP), filed on Jul. 19, 2021.
Prior Publication US 2023/0018009 A1, Jan. 19, 2023
Int. Cl. B65G 1/14 (2006.01)
CPC B65G 1/14 (2013.01) [B65G 2201/0297 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A substrate holder comprising:
a first boat configured to hold a substrate in a shelf-like manner; and
a second boat coaxial with the first boat and provided to move up and down relative to the first boat, the second boat configured to hold the substrate in a shelf-like manner,
wherein the first boat includes a first bottom plate and a first ceiling plate provided to vertically face each other, a first support column connecting the first bottom plate and the first ceiling plate to each other, and a first placement surface on which the substrate is placed,
wherein the second boat includes a second bottom plate and a second ceiling plate provided to vertically face each other, a second support column connecting the second bottom plate and the second ceiling plate, and a second placement surface on which the substrate is placed,
wherein the second ceiling plate is arranged to overlap the first ceiling plate in a plan view, and
wherein the second support column is shorter than the first support column.