US 12,233,560 B2
Automated gas supply system
Min Sung Ha, Seoul (KR); Kwang-Jun Kim, Ansan-si (KR); Jong Kyu Kim, Suwon-si (KR); Hyun-Joong Kim, Seongnam-si (KR); Jin Ho So, Seoul (KR); Chi-Gun An, Suwon-si (KR); Ki Moon Lee, Seoul (KR); Hui Gwan Lee, Suwon-si (KR); and Beom Soo Hwang, Seoul (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Dec. 20, 2023, as Appl. No. 18/390,413.
Application 18/390,413 is a division of application No. 17/665,949, filed on Feb. 7, 2022, granted, now 11,904,480.
Prior Publication US 2024/0116184 A1, Apr. 11, 2024
Int. Cl. B25J 9/16 (2006.01); B25J 5/02 (2006.01); B25J 9/00 (2006.01); B25J 13/08 (2006.01)
CPC B25J 9/1687 (2013.01) [B25J 5/02 (2013.01); B25J 9/0093 (2013.01); B25J 9/1682 (2013.01); B25J 13/088 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of operating an automated gas supply system, the method comprising:
receiving a cradle in which one or more gas cylinders storing a gas therein are stored, the cradle being received at a gas cylinder transfer unit;
transferring a gas cylinder among the one or more gas cylinders in the cradle from the gas cylinder transfer unit to a gas cylinder inspection unit, by a mobile robot;
checking properties of a gas stored in the gas cylinder in the gas cylinder inspection unit and whether the gas leaks from the gas cylinder in the gas cylinder inspection unit;
transferring the gas cylinder from the gas cylinder inspection unit to a gas cylinder storage unit, by the mobile robot;
transferring the gas cylinder from the gas cylinder storage unit to a gas cylinder replacement unit, by the mobile robot; and
connecting a gas nozzle of the gas cylinder to a gas pipe, which is connected to a semiconductor manufacturing process line in the gas cylinder replacement unit, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line.