CPC H10K 71/233 (2023.02) [G03F 1/32 (2013.01); H10K 59/1201 (2023.02); H10K 59/123 (2023.02); H10K 59/124 (2023.02); H10K 71/00 (2023.02)] | 8 Claims |
1. A mask plate, comprising:
a transparent substrate; and
an opaque film layer, the opaque film layer being disposed on the transparent substrate,
wherein the opaque film layer comprises a plurality of first regions and a plurality of second regions,
wherein a first sub-region in a first region of the plurality of first regions and a second region of the plurality of second regions are transmissive, and
wherein a remaining portion in the first region is semi-transmissive, the remaining portion in the first region comprises an annular third sub-region surrounding the first sub-region from four sides and an annular fourth sub-region surrounding the third sub-region from four sides, the third sub-region is opaque, and the fourth sub-region is transmissive.
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