US 11,909,373 B2
Bulk acoustic resonator structures with improved edge frames
Shing-Kuo Wang, Torrance, CA (US); Liping D. Hou, Torrance, CA (US); Kun-Mao Pan, Harbor City, CA (US); Andy Chien-Hsiang Chen, Cypress, CA (US); and Robert B. Stokes, Rancho Palos Verdes, CA (US)
Assigned to GLOBAL COMMUNICATION SEMICONDUCTORS, LLC, Torrance, CA (US)
Filed by Global Communication Semiconductors, LLC, Torrance, CA (US)
Filed on Oct. 15, 2020, as Appl. No. 17/071,849.
Claims priority of provisional application 62/915,577, filed on Oct. 15, 2019.
Claims priority of provisional application 62/915,588, filed on Oct. 15, 2019.
Claims priority of provisional application 62/915,573, filed on Oct. 15, 2019.
Claims priority of provisional application 62/915,581, filed on Oct. 15, 2019.
Prior Publication US 2021/0111702 A1, Apr. 15, 2021
Int. Cl. H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H10N 30/85 (2023.01); H10N 30/00 (2023.01)
CPC H03H 9/02015 (2013.01) [H03H 9/0211 (2013.01); H03H 9/02102 (2013.01); H03H 9/02118 (2013.01); H03H 9/131 (2013.01); H03H 9/17 (2013.01); H03H 9/173 (2013.01); H10N 30/1051 (2023.02); H10N 30/85 (2023.02)] 19 Claims
OG exemplary drawing
 
1. A bulk acoustic resonator, comprising:
a substrate;
a stack over the substrate, the stack including a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode; and
an edge frame, wherein:
a region of overlap of the first electrode, the second electrode and the piezoelectric layer forms an active region of the stack;
the edge frame is a raised metal frame extending parallel to a periphery of the active region of the stack and has one or more cuts such that the edge frame does not form a closed loop; and
each respective cut of the one or more cuts is at a respective location along the periphery of the active region and is slanted with reference to a direction of extension of the edge frame at the respective location so as to reduce loss of acoustic energy in the active region through the respective cut.