CPC H03H 9/02015 (2013.01) [H03H 9/0211 (2013.01); H03H 9/02102 (2013.01); H03H 9/02118 (2013.01); H03H 9/131 (2013.01); H03H 9/17 (2013.01); H03H 9/173 (2013.01); H10N 30/1051 (2023.02); H10N 30/85 (2023.02)] | 19 Claims |
1. A bulk acoustic resonator, comprising:
a substrate;
a stack over the substrate, the stack including a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode; and
an edge frame, wherein:
a region of overlap of the first electrode, the second electrode and the piezoelectric layer forms an active region of the stack;
the edge frame is a raised metal frame extending parallel to a periphery of the active region of the stack and has one or more cuts such that the edge frame does not form a closed loop; and
each respective cut of the one or more cuts is at a respective location along the periphery of the active region and is slanted with reference to a direction of extension of the edge frame at the respective location so as to reduce loss of acoustic energy in the active region through the respective cut.
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