US 11,908,901 B1
Graphene varactor including ferroelectric material
Steven J. Koester, Edina, MN (US); and Venkata Raghava Saran Kumar Chaganti, Minneaplis, MN (US)
Assigned to Regents of the University of Minnesota, Minneapolis, MN (US)
Filed by Regents of the University of Minnesota, Minneapolis, MN (US)
Filed on Mar. 13, 2020, as Appl. No. 16/818,494.
Claims priority of provisional application 62/818,498, filed on Mar. 14, 2019.
Int. Cl. H01L 29/16 (2006.01); H01L 29/40 (2006.01); H01L 21/28 (2006.01); H01L 29/93 (2006.01)
CPC H01L 29/1606 (2013.01) [H01L 29/408 (2013.01); H01L 29/40111 (2019.08); H01L 29/93 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A varactor comprising:
a gate electrode;
a graphene layer; and
a ferroelectric layer between the gate electrode and the graphene layer,
wherein a capacitance tuning range of the varactor is based at least partially on a quantum capacitance effect of the graphene layer, and
wherein a capacitance state of the varactor is non-volatile and based at least partially on the quantum capacitance effect.