CPC H01L 21/823878 (2013.01) [H01L 21/0228 (2013.01); H01L 21/76224 (2013.01); H01L 21/823821 (2013.01); H01L 27/0924 (2013.01)] | 20 Claims |
1. A method comprising:
etching a trench in a substrate;
depositing a liner material in the trench with an atomic layer deposition process;
depositing a flowable material on the liner material and in the trench with a contouring flowable chemical vapor deposition process;
converting the liner material and the flowable material to a solid insulation material, a portion of the trench remaining unfilled by the solid insulation material;
forming a hybrid fin in the portion of the trench unfilled by the solid insulation materials; and
recessing the solid insulation material so that the hybrid fin protrudes above the solid insulation material.
|