US 11,908,725 B2
Electrostatic chuck heater and manufacturing method therefor
Jin Young Choi, Anseong-si (KR); Jun Won Seo, Anseong-si (KR); and Ju Sung Lee, Anseong-si (KR)
Assigned to MICO CERAMICS LTD., Anseong-si (KR)
Appl. No. 17/633,177
Filed by MICO CERAMICS LTD., Anseong-si (KR)
PCT Filed Jun. 23, 2020, PCT No. PCT/KR2020/008186
§ 371(c)(1), (2) Date Feb. 4, 2022,
PCT Pub. No. WO2021/025287, PCT Pub. Date Feb. 11, 2021.
Claims priority of application No. 10-2019-0095376 (KR), filed on Aug. 6, 2019.
Prior Publication US 2022/0301916 A1, Sep. 22, 2022
Int. Cl. H01L 21/683 (2006.01); B28B 11/24 (2006.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01); H05B 6/62 (2006.01)
CPC H01L 21/6833 (2013.01) [B28B 11/243 (2013.01); C23C 14/50 (2013.01); C23C 16/4586 (2013.01); H05B 6/62 (2013.01); H05B 2203/017 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An electrostatic chuck heater comprising:
a heater body including an internal electrode and an external electrode configured to selectively perform any one of a radio-frequency (RF) grounding function and an electrostatic chuck function according to a semiconductor process mode; and
a heater support mounted below the heater body to support the heater body,
wherein the heater body further includes an external electrode connecting member disposed between an electrode layer and a heating element layer to electrically connect the external electrode and a rod installed in the heater support to each other, and
wherein the external electrode connecting member is spaced apart from lower surfaces of the internal electrode and the external electrode by a predetermined distance and disposed in parallel to the electrodes, and both ends of the external electrode connecting member are bent toward the lower surface of the external electrode.