CPC H01L 21/67309 (2013.01) [C23C 16/4583 (2013.01); C23C 16/46 (2013.01); H01L 21/0217 (2013.01); H01L 21/02271 (2013.01)] | 20 Claims |
1. A system, comprising:
a top base having an opening therein, wherein the top base includes a slot to form a C-shape such that the top base is not completely annular;
a bottom base; and
a rod set comprising multiple rods connected to the bottom base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots.
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