CPC G03F 7/70033 (2013.01) [H05G 2/008 (2013.01)] | 20 Claims |
1. A method, comprising:
generating a pre-pulse laser beam;
providing, to an extreme ultraviolet (EUV) radiation source, the pre-pulse laser beam to generate a deformed droplet from a droplet of a target material in a vessel of the EUV radiation source;
splitting a laser output into a first portion and a second portion;
generating, based on the first portion, a main-pulse laser beam having a first spatial energy-distribution profile;
generating, based on the second portion, an auxiliary laser beam having a second spatial energy-distribution profile,
wherein the second spatial energy-distribution profile is based on the first spatial energy-distribution profile to achieve a target spatial energy-distribution profile for a combination of the main-pulse laser beam and the auxiliary laser beam; and
providing, to the EUV radiation source, the main-pulse laser beam and the auxiliary laser beam to generate a plasma from the deformed droplet in the vessel of the EUV radiation source.
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