US 11,906,549 B1
Compliant pin probes with flat extension springs, methods for making, and methods for using
Ming Ting Wu, San Jose, CA (US)
Assigned to Microfabrica Inc., Van Nuys, CA (US)
Filed by Microfabrica Inc., Van Nuys, CA (US)
Filed on Feb. 28, 2022, as Appl. No. 17/682,340.
Application 17/682,340 is a continuation of application No. 17/139,940, filed on Dec. 31, 2020, abandoned.
Claims priority of provisional application 62/961,672, filed on Jan. 15, 2020.
Claims priority of provisional application 62/961,675, filed on Jan. 15, 2020.
Claims priority of provisional application 62/961,678, filed on Jan. 15, 2020.
Claims priority of provisional application 62/956,124, filed on Dec. 31, 2019.
Claims priority of provisional application 62/956,122, filed on Dec. 31, 2019.
Claims priority of provisional application 62/956,016, filed on Dec. 31, 2019.
Int. Cl. G01R 1/067 (2006.01); G01R 3/00 (2006.01); G01R 1/073 (2006.01)
CPC G01R 1/06722 (2013.01) [G01R 1/06738 (2013.01); G01R 1/0735 (2013.01); G01R 3/00 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A probe for testing a device under test (DUT), comprising:
(a) a first tip for making electrical contact to an electrical circuit element, the first tip having a contact region and an attachment region;
(b) a first extension arm connecting directly or indirectly to the attachment region of the first tip;
(c) a compliant structure comprising at least one spring segment, wherein a first region of the compliant structure joins the first extension arm;
(d) a second extension arm joining a second region of the compliant structure such that relative displacement of the first and second extension arms results in elastic movement of the at least one spring segment of the compliant structure;
(e) a second tip having a first attachment region and a second region wherein the first attachment region of the second tip joins the second extension arm; and
(f) a guidance structure that limits elastic movement of the compliant structure to substantially longitudinal movement along a longitudinal axis of the probe,
wherein the at least one spring segment operates under tension to provide an elastic restoration force,
wherein the second region of the second tip is configured for making an electrical connection to a second circuit element, wherein the configuration is selected from a group consisting of: (1) a tip for making a contact connection, and (2) a tip for making an attached connection,
wherein the probe further comprises at least two movable stop structures to allow pre-biasing of the at least one spring segment, and
wherein the at least two movable stop structures each include a respective opening through which one of the first extension arm or the second extension arm can pass.