CPC G01N 21/9501 (2013.01) [G01N 2201/0636 (2013.01)] | 10 Claims |
1. An optical system for imaging, which focuses inspection light and monitoring light on an inspection target, the optical system comprising:
a dioptric group configured to receive inspection light and monitoring light and to primarily focus the inspection light and the monitoring light on different locations; and
a reflection dioptric group configured to reflect and refract the inspection light and the monitoring light that have passed through the dioptric group and to bring the inspection light and the monitoring light into one focus,
wherein the inspection light and the monitoring light have different wavelength bands within a UV-C wavelength band,
a lens that is first disposed within the dioptric group is implemented as a vitreous fluoride material, and
a lens configured to reflect light passing through the dioptric group within the reflection dioptric group and to transmit light that is incident thereon after being reflected by a mirror surface of a lens within the reflection dioptric group is implemented as a vitreous fluoride material.
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