US 11,906,422 B2
Compact photoacoustic detection device
Emmanuel Ollier, Grenoble (FR); Caroline Coutier, Grenoble (FR); Laurent Duraffourg, Grenoble (FR); and Thierry Verdot, Grenoble (FR)
Assigned to Commissariat à l'Energie Atomique et aux Energies Alternatives, Paris (FR)
Filed by Commissariat à l'Energie Atomique et aux Energies Alternatives, Paris (FR)
Filed on Nov. 25, 2022, as Appl. No. 18/058,803.
Claims priority of application No. 21 12618 (FR), filed on Nov. 28, 2021.
Prior Publication US 2023/0168183 A1, Jun. 1, 2023
Int. Cl. G01N 21/17 (2006.01); G01N 21/39 (2006.01)
CPC G01N 21/1702 (2013.01) [G01N 2021/1704 (2013.01); G01N 2021/399 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A photoacoustic detection device, comprising:
a light source, configured to emit a light beam about an illumination axis;
a cavity, configured to receive a gas;
a detector, configured to detect an acoustic wave being propagated through the cavity;
the device comprising a substrate, extending between a bottom face and a top face, wherein the substrate is such that:
the cavity is formed in the substrate, between the bottom face and the top face;
a trench is formed in the substrate, the trench being delimited by the top face, the light source being inserted into the trench, on the top face, so that the top face thus extends between the cavity and the light source;
the substrate comprises an illumination portion, delimiting the trench, disposed facing the light source, the illumination portion extending between:
a proximal face, formed on the top face, disposed opposite the light source;
and a distal face, formed on the top face, the distal face forming a reflector configured to reflect the light towards the cavity;
such that the light beam, emitted by the light source, is propagated, through the illumination portion, between the proximal face and the distal face, before being reflected, by the distal face, towards the cavity.