US 11,906,306 B2
Inertial measurement circuit, corresponding device and method
Giacomo Langfelder, Milan (IT); Leonardo Gaffuri Pagani, Sesto san Giovanni (IT); Luca Guerinoni, Alzano Lombaro (IT); Luca Giuseppe Falorni, Limbiate (IT); Patrick Fedeli, Senago (IT); and Paola Carulli, Bari (IT)
Assigned to STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed by STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed on May 20, 2022, as Appl. No. 17/750,074.
Claims priority of application No. 102021000014621 (IT), filed on Jun. 4, 2021.
Prior Publication US 2022/0390234 A1, Dec. 8, 2022
Int. Cl. G01C 19/5776 (2012.01); G01C 19/5712 (2012.01)
CPC G01C 19/5712 (2013.01) [G01C 19/5776 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A circuit comprising:
an inertial measurement unit configured to be oscillated via a driving signal provided by driving circuitry;
a lock-in amplifier configured to:
receive a sensing signal from the inertial measurement unit and a reference demodulation signal which is a function of the driving signal; and
provide an inertial measurement signal based on the sensing signal, wherein the reference demodulation signal is affected by a variable phase error;
phase meter circuitry configured to:
receive the driving signal and the sensing signal; and
provide, as a function of a phase difference between the driving signal and the sensing signal, a phase correction signal for the reference demodulation signal; and
a correction node configured to apply the phase correction signal to the reference demodulation signal so that, in response to the phase correction signal being applied to the reference demodulation signal, the phase error is maintained in a vicinity of a reference value.