US 11,905,305 B2
Silicon precursor compound, preparation method therefor, and silicon-containing film formation method using same
Jin Sik Kim, Pyeongtaek-si (KR); Myeong Ho Kim, Cheonan-si (KR); Mi Hee Lee, Daegu (KR); Byung Kwan Kim, Pyeongtaek-si (KR); Jun Hwan Choi, Goyang-si (KR); Sungwoo Ahn, Yangju-si (KR); and Yun Gyeong Yi, Guri-si (KR)
Assigned to UP CHEMICAL CO., LTD., Pyeongtaek-si (KR)
Filed by UP CHEMICAL CO., LTD., Pyeongtaek-si (KR)
Filed on May 14, 2021, as Appl. No. 17/320,326.
Application 17/320,326 is a continuation of application No. PCT/KR2019/015676, filed on Nov. 15, 2019.
Claims priority of application No. 10-2018-0140389 (KR), filed on Nov. 15, 2018.
Prior Publication US 2021/0269463 A1, Sep. 2, 2021
Int. Cl. C07F 7/10 (2006.01); C23C 16/24 (2006.01); C23C 16/32 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01)
CPC C07F 7/10 (2013.01) [C23C 16/24 (2013.01); C23C 16/325 (2013.01); C23C 16/345 (2013.01); C23C 16/401 (2013.01); C23C 16/45536 (2013.01); C23C 16/45553 (2013.01)] 17 Claims
 
1. A silicon precursor compound, represented by the following Chemical Formula 1 or the following Chemical Formula 2:

OG Complex Work Unit Chemistry

OG Complex Work Unit Chemistry
wherein, in the above Chemical Formula 1 and Chemical Formula 2,
R1 is hydrogen or —NRaRb,
each of Ra and Rb is independently hydrogen, a linear or branched C1-C5 alkyl group, or dimethylsilyl group, or Ra and Rb are a substituted or unsubstituted C4-C10 cyclic alkyl group linked to each other, provided that Ra and Rb are not hydrogen at the same time,
R2 is a linear or branched C1-C5 alkyl group, trimethylsilyl group, or dimethylsilyl group, provided that, when R1 is hydrogen, R2 is a linear or branched C1-C5 alkyl group,
each of R3 to R5 is independently hydrogen, or a linear or branched C1-C3 alkyl group, provided that R3 to R5 are not hydrogen at the same time,
R6 is a linear or branched C1-C5 alkyl group, and
each of R7 to R9 is independently hydrogen, or a linear or branched C1-C3 alkyl group, provided that R7 to R9 are not hydrogen at the same time.