CPC C03C 17/245 (2013.01) [C03C 3/091 (2013.01); C03C 3/097 (2013.01); C03C 17/225 (2013.01); C03C 2217/281 (2013.01); C03C 2217/29 (2013.01); C03C 2217/78 (2013.01); C03C 2217/91 (2013.01); C03C 2218/155 (2013.01)] | 26 Claims |
1. An article, comprising:
a substrate comprising a glass, glass-ceramic or ceramic composition and comprising a primary surface; and
a protective film disposed on the primary surface of the substrate,
wherein the protective film has a maximum hardness of greater than 12 GPa at a depth of 500 nanometers, as measured on the protective film disposed on the substrate,
wherein the protective film comprises a crack onset strain (COS) failure level of 0.5% or greater,
wherein the protective film comprises a metal oxynitride comprising a graded region that is graded such that an oxygen concentration in the film varies by 1.3 or more atomic %,
wherein the protective film further comprises a non-graded region, wherein the graded region is bounded by the primary surface of the substrate and the non-graded region,
wherein the oxygen concentration in the graded region decreases from the primary surface of the substrate to the non-graded region,
further wherein the substrate comprises an elastic modulus less than an elastic modulus of the protective film.
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