US 11,904,522 B2
Imprint apparatus and method for manufacturing article
Tatsuya Hayashi, Utsunomiya (JP); Tomomi Funayoshi, Utsunomiya (JP); and Kenichi Kobayashi, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Mar. 27, 2020, as Appl. No. 16/833,168.
Application 16/833,168 is a continuation of application No. PCT/JP2018/033851, filed on Sep. 12, 2018.
Claims priority of application No. 2017-191760 (JP), filed on Sep. 29, 2017.
Prior Publication US 2020/0223126 A1, Jul. 16, 2020
Int. Cl. B29C 59/16 (2006.01)
CPC B29C 59/16 (2013.01) 13 Claims
OG exemplary drawing
 
1. An imprint apparatus that forms a cured product of an imprint material on a substrate by using a mold having a mesa, the imprint apparatus comprising:
a mold holder that holds the mold;
an optical system that irradiates the imprint material on the substrate with irradiation light for increasing a viscosity of the imprint material; and
a control unit composed of a computer configured to execute a program that:
causes the optical system to provide the irradiation light such that the irradiation light has a light intensity distribution in which a light intensity increases from a center of the mesa of the mold toward a side surface of the mesa when the mold is held by the mold holder, and
while the mold and the imprint material on the substrate are in contact with each other, causes the optical system to irradiate, with the irradiation light having the light intensity smaller than a peak of the light intensity distribution, a boundary surface of the imprint material between the mold and the substrate that moves from the center of the mesa of the mold toward the side surface of the mesa in a region including the side surface of the mesa.