CPC B24B 37/015 (2013.01) [B24B 37/20 (2013.01); B24B 37/30 (2013.01); B24B 53/017 (2013.01)] | 20 Claims |
1. An apparatus comprising:
a polishing pad;
a pad conditioner adjacent to the polishing pad, wherein the pad conditioner comprises a first channel and a second channel therein;
a heat-exchange supplying unit connected to the first channel; and
a control unit configured to control operations of the pad conditioner and the heat-exchange supplying unit, wherein the control unit is configured to:
in response to a first temperature of the polishing pad lower than a pre-set temperature range, turning on conduction of a heating media from the heat-exchange supplying unit into the first channel; and
in response to a second temperature of the polishing pad higher than the pre-set temperature range, turning on conduction of a cooling media from the heat-exchange supplying unit into the second channel; and
in response to a third temperature of the polishing pad in the pre-set temperature range, conducting additional heat-exchange medias other than the heating media and the cooling media into both of the first channel and the second channel, wherein the additional heat-exchange medias have temperatures substantially the same as the third temperature.
|