US 12,232,334 B2
Semiconductor memory devices and methods of manufacturing thereof
Meng-Han Lin, Hsinchu (TW); and Chia-En Huang, Xinfeng Township (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Nov. 21, 2023, as Appl. No. 18/516,521.
Application 18/516,521 is a division of application No. 17/586,351, filed on Jan. 27, 2022, granted, now 11,856,796.
Claims priority of provisional application 63/222,526, filed on Jul. 16, 2021.
Prior Publication US 2024/0099024 A1, Mar. 21, 2024
Int. Cl. H01L 29/423 (2006.01); G11C 13/00 (2006.01); H01L 21/28 (2006.01); H10B 63/00 (2023.01)
CPC H10B 63/30 (2023.02) [G11C 13/0002 (2013.01); H01L 21/28158 (2013.01); H01L 29/42364 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A semiconductor device, comprising:
a first transistor comprising:
a first silicon layer;
a high-k gate dielectric layer disposed above the first silicon layer;
a first metal gate disposed above the high-k gate dielectric layer; and
a first source region and a first drain region disposed within the first silicon layer;
a second transistor comprising:
a second silicon layer;
a first silicon oxide layer disposed above the second silicon layer;
a plurality of first doped silicon gates disposed above the first silicon oxide layer;
a plurality of portions of a second doped silicon gate disposed above the first silicon oxide layer, wherein the plurality of first doped silicon gates and the plurality of portions of the second doped silicon gate are alternately arranged with each other; and
a second source region and a second drain region disposed within the second silicon layer; and
a memory component disposed above the first and second transistors, and electrically coupled to the second source region or the second drain region.