US 12,231,113 B2
Rotation in XY plane to suppress spurious modes in XBAR devices
Bryant Garcia, Mississauga (CA)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 4, 2022, as Appl. No. 17/687,544.
Application 17/687,544 is a continuation of application No. 16/885,163, filed on May 27, 2020, granted, now 11,323,095.
Application 16/885,163 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 62/896,821, filed on Sep. 6, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2022/0190807 A1, Jun. 16, 2022
Int. Cl. H03H 9/56 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 3/02 (2006.01); H10N 30/87 (2023.01)
CPC H03H 9/568 (2013.01) [H03H 9/02015 (2013.01); H03H 9/02031 (2013.01); H03H 9/02062 (2013.01); H03H 9/02228 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 3/02 (2013.01); H03H 2003/023 (2013.01); H03H 9/02039 (2013.01); H10N 30/877 (2023.02)] 17 Claims
OG exemplary drawing
 
1. A method of fabricating a filter device on a piezoelectric plate having front and back surfaces, the back surface attached to a substrate, the method comprising:
forming one or more cavities in the substrate such that respective portions of the piezoelectric plate form one or more diaphragms that are each over a respective cavity of the one or more cavities;
forming a conductor pattern on the piezoelectric plate, the conductor pattern including one or more interdigital transducers (IDTs) of a respective one or more resonators, wherein interleaved fingers of the one or more IDTs are on a respective diaphragm of the one or more diaphragms,
wherein the piezoelectric plate and the one or more IDTs are configured such that radio frequency signals applied to the one or more IDTs excite respective primary shear acoustic modes in the respective one or more diaphragms, wherein respective directions of acoustic energy flow of each of the excited primary shear acoustic modes are substantially normal to the front and back surfaces of the piezoelectric plate,
wherein the interleaved fingers of at least one IDT of the one or more IDTs extend parallel to each other and at an oblique angle to an Y crystalline axis of the piezoelectric plate, and
wherein the interleaved fingers of the at least one IDT are on a respective diaphragm of the one or more diaphragms extend at an angle different from the interleaved fingers of at least one other IDT of the IDTs that is disposed on a respective diaphragm of the plurality of diaphragms.