| CPC H03H 9/1092 (2013.01) [H03H 3/08 (2013.01); H03H 9/145 (2013.01)] | 15 Claims |

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1. An electronic component, comprising:
a substrate;
a functional element on the substrate;
a first electrode on the substrate and electrically connected to the functional element;
a support body made of an insulator and protruding from the substrate and covering the first electrode;
a cover portion opposing the substrate and supported by the support body;
a second electrode in a via hole extending through the support body and the cover portion and electrically connected to the first electrode; and
a projection on the first electrode in the via hole; wherein
a hollow space is defined by the substrate, the support body, and the cover portion;
the functional element is located in the hollow space; and
the projection is made of an insulator and is completely covered by the second electrode.
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