US 12,230,936 B2
Laser amplification device and extreme ultraviolet light generation apparatus
Yuzuru Tadokoro, Tokyo (JP); Tatsuya Yamamoto, Tokyo (JP); and Junichi Nishimae, Tokyo (JP)
Assigned to MITSUBISHI ELECTRIC CORPORATION, Tokyo (JP)
Appl. No. 17/792,715
Filed by Mitsubishi Electric Corporation, Tokyo (JP)
PCT Filed Mar. 16, 2020, PCT No. PCT/JP2020/011525
§ 371(c)(1), (2) Date Jul. 14, 2022,
PCT Pub. No. WO2021/186508, PCT Pub. Date Sep. 23, 2021.
Prior Publication US 2023/0051665 A1, Feb. 16, 2023
Int. Cl. H01S 3/11 (2023.01); H01S 3/00 (2006.01); H01S 3/094 (2006.01); H01S 3/223 (2006.01); H01S 3/23 (2006.01); H05G 2/00 (2006.01)
CPC H01S 3/1103 (2013.01) [H01S 3/0014 (2013.01); H01S 3/0085 (2013.01); H01S 3/094076 (2013.01); H01S 3/2232 (2013.01); H01S 3/2308 (2013.01); H05G 2/008 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A laser amplification device comprising:
a laser oscillator including a first laser active medium including a mixed gas containing carbon dioxide gas to emit pulsed laser light with a full width at half maximum of between 15 ns to 200 ns; and
a laser amplifier including a second laser active medium including a mixed gas containing carbon dioxide gas through which the pulsed laser light emitted from the laser oscillator passes to be shortened to pulsed laser light with a full width at half maximum of between 5 ns and 30 ns to be output, wherein
a value obtained by dividing a rise time that is a time from when intensity of the pulsed laser light output from the laser oscillator rises to 10% of a maximum intensity to when the intensity rises to 90% of the maximum intensity by the full width at half maximum of the pulsed laser light output from the laser oscillator is smaller than 0.72.