CPC H01L 27/14636 (2013.01) [H01L 23/49811 (2013.01); H01L 23/49827 (2013.01); H01L 23/5286 (2013.01); H01L 24/19 (2013.01); H01L 24/20 (2013.01); H01L 27/14618 (2013.01); H01L 27/14678 (2013.01); G06V 40/12 (2022.01); H01L 21/568 (2013.01); H01L 2224/04105 (2013.01); H01L 2224/211 (2013.01); H01L 2224/214 (2013.01); H01L 2924/12042 (2013.01); H01L 2924/181 (2013.01); H01L 2924/18162 (2013.01)] | 20 Claims |
1. An electronic device comprising:
a signal distribution structure comprising a first conductor and a first dielectric material laterally surrounding the first conductor, the first dielectric material forming a first exterior side of the electronic device;
a semiconductor die comprising a first die side, a second die side opposite the first die side, and lateral die sides between the first die side and the second die side, wherein the first die side comprises a sensor and a bond pad;
an encapsulant that laterally covers the lateral die sides, wherein the encapsulant comprises a first encapsulant side, a second encapsulant side, and a lateral encapsulant side between the first encapsulant side and the second encapsulant side;
an interconnect structure passing through the encapsulant, wherein the interconnect structure is electrically coupled to the bond pad and the first conductor;
a protection structure over the first die side and spaced apart from the first die side, wherein the protection structure forms a second exterior side of the electronic device, opposite the first exterior side, with no conductive material exposed at the second exterior side; and
a second dielectric material between the protection structure and the first die side, wherein the sensor is operable to sense an object through the protection structure and the second dielectric material.
|