US 12,230,656 B2
Image sensing device including grid structures having different heights
Min Su Cho, Icheon-si (KR)
Assigned to SK HYNIX INC., Icheon-si (KR)
Filed by SK hynix Inc., Icheon-si (KR)
Filed on Jan. 12, 2023, as Appl. No. 18/096,391.
Application 18/096,391 is a division of application No. 16/941,049, filed on Jul. 28, 2020, granted, now 11,557,617.
Claims priority of application No. 10-2020-0013093 (KR), filed on Feb. 4, 2020.
Prior Publication US 2023/0170362 A1, Jun. 1, 2023
Int. Cl. H01L 27/146 (2006.01)
CPC H01L 27/14621 (2013.01) [H01L 27/14627 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An image sensing device comprising:
a pixel array including a plurality of unit pixels, each of which is configured to generate a pixel signal corresponding to incident light;
wherein the pixel array includes:
a substrate layer including a plurality of photoelectric conversion elements configured to convert the incident light into an electric signal;
one or more grid structures disposed at intervals over the substrate layer, and configured to have different heights at different locations in the pixel array;
a plurality of color filters disposed in a spacing defined by the grid structures and configured to transmit light at predetermined wavelengths to corresponding photoelectric conversion elements; and
a plurality of microlenses disposed over the color filters,
wherein the plurality of microlenses is consecutively arranged and, as a whole, forms a curved shape that is thinner at a center portion of the pixel array and thicker at an edge portion of the pixel array, and
wherein the plurality of microlenses is formed to have different heights depending on their locations in the pixel array, and each of the microlenses has a flat top surface, and top surfaces of neighboring microlenses of the plurality of microlenses are consecutively arranged.