| CPC H01L 27/0783 (2013.01) [H01L 27/0248 (2013.01); H01L 21/26513 (2013.01); H01L 21/266 (2013.01)] | 19 Claims |

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1. A method of manufacturing a switching device, comprising:
forming an arsenic-doped silicon layer; and
forming a phosphorus-doped silicon layer in the arsenic-doped silicon layer.
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