US 12,230,618 B2
Optical sensor, and method for manufacturing optical sensor
Yuya Hasegawa, Kyoto (JP); and Takaaki Masaki, Kyoto (JP)
Assigned to ROHM CO., LTD., Kyoto (JP)
Appl. No. 17/636,258
Filed by ROHM CO., LTD., Kyoto (JP)
PCT Filed Jul. 21, 2020, PCT No. PCT/JP2020/028234
§ 371(c)(1), (2) Date Feb. 17, 2022,
PCT Pub. No. WO2021/039214, PCT Pub. Date Mar. 4, 2021.
Claims priority of application No. 2019-152616 (JP), filed on Aug. 23, 2019.
Prior Publication US 2022/0302094 A1, Sep. 22, 2022
Int. Cl. H01L 25/16 (2023.01); H01L 31/0203 (2014.01); H01L 31/0232 (2014.01); H01L 33/54 (2010.01); H01L 33/58 (2010.01); G01S 17/04 (2020.01); H01L 23/00 (2006.01)
CPC H01L 25/167 (2013.01) [H01L 31/0203 (2013.01); H01L 31/02327 (2013.01); H01L 33/54 (2013.01); H01L 33/58 (2013.01); G01S 17/04 (2020.01); H01L 24/48 (2013.01); H01L 2224/48227 (2013.01); H01L 2924/12041 (2013.01); H01L 2924/12043 (2013.01); H01L 2924/13056 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An optical sensor, comprising:
a substrate including a substrate main surface intersecting a thickness-wise direction;
a light emitting element disposed on the substrate main surface;
a light receiving element disposed on the substrate main surface;
a transparent first cover disposed on the substrate main surface to cover the light emitting element; and
a transparent second cover disposed on the substrate main surface to cover the light receiving element; wherein
the first cover and the second cover are spaced apart by a gap,
the first cover includes a first upper surface intersecting the thickness-wise direction and first side surfaces intersecting the first upper surface,
the second cover includes a second upper surface intersecting the thickness-wise direction and second side surfaces intersecting the second upper surface,
the first side surfaces include a first inner side surface that faces the gap and a first outer side surface that does not face the gap,
the second side surfaces include a second inner side surface that faces the gap and a second outer side surface that does not face the gap, and
the first inner side surface has a greater roughness than the first upper surface.