US 12,230,530 B2
Apparatus and methods for semiconductor processing
Joseph Yudovsky, Campbell, CA (US); and Kaushal Gangakhedkar, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 9, 2024, as Appl. No. 18/630,688.
Application 17/403,756 is a division of application No. 15/927,066, filed on Mar. 20, 2018, granted, now 11,094,577, issued on Aug. 20, 2021.
Application 18/630,688 is a continuation of application No. 18/095,827, filed on Jan. 11, 2023, granted, now 11,984,343.
Application 18/095,827 is a continuation of application No. 17/403,756, filed on Aug. 16, 2021.
Application 15/927,066 is a continuation of application No. 14/773,005, granted, now 9,922,860, issued on Mar. 20, 2018, previously published as PCT/US2014/028502, filed on Mar. 14, 2014.
Claims priority of provisional application 61/783,418, filed on Mar. 14, 2013.
Prior Publication US 2024/0258153 A1, Aug. 1, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/683 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01); C23C 16/50 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/6838 (2013.01) [C23C 16/45544 (2013.01); C23C 16/458 (2013.01); C23C 16/46 (2013.01); C23C 16/50 (2013.01); H01L 21/68735 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A susceptor for a processing chamber, the susceptor comprising:
a susceptor top surface;
a susceptor bottom surface;
a plurality of recesses in the susceptor top surface to support a plurality of wafers, the plurality of recesses positioned so that central axes of the plurality of wafers are offset from a central axis of the susceptor, when the wafers are supported by the recesses, each of the plurality of recesses having a bottom surface; and
for at least one of the plurality of recesses;
a passage connected with the at least one of the plurality of recesses and extending below the at least one of the plurality of recesses to the susceptor bottom surface,
a hole extending from a surface of the susceptor at a location outside of the at least one of the plurality of recesses to the passage, and
the hole configured to receive a plug that seals the hole.