US 12,230,526 B2
Electrostatic chuck heater
Tatsuya Kuno, Nagoya (JP); Hiroshi Takebayashi, Handa (JP); and Kenichiro Aikawa, Handa (JP)
Assigned to NGK INSULATORS, LTD., Nagoya (JP)
Filed by NGK INSULATORS, LTD., Nagoya (JP)
Filed on Oct. 20, 2021, as Appl. No. 17/451,504.
Application 17/451,504 is a continuation of application No. PCT/JP2020/024573, filed on Jun. 23, 2020.
Claims priority of application No. 2019-121489 (JP), filed on Jun. 28, 2019.
Prior Publication US 2022/0037188 A1, Feb. 3, 2022
Int. Cl. H01L 21/683 (2006.01); H01L 21/67 (2006.01); H05B 3/28 (2006.01)
CPC H01L 21/6833 (2013.01) [H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H05B 3/283 (2013.01)] 6 Claims
OG exemplary drawing
 
1. An electrostatic chuck heater comprising:
an electrostatic chuck including an electrostatic electrode embedded in a ceramic sintered body comprising alumina including a dielectric layer and an insulating layer;
a cooling member cooling the electrostatic chuck; and
a heater layer disposed between the electrostatic chuck and the cooling member and including six metal layers embedded therein in multiple stages, the six metal layers including resistance heating element layers,
wherein the heater layer includes five ceramic insulating layers surrounding the six metal layers with a thickness of each ceramic insulating layer being 2 μm or more and 50 μm or less between each pair of metal layers, and a rear-side ceramic insulating layer with a thickness of about 0.05 mm between the sixth metal layer and the cooling member;
wherein each ceramic insulating layer is an aerosol deposition film or a thermally sprayed film comprising alumina;
wherein the total thickness of the heater layer (sum of thicknesses for the five ceramic insulating layers and the rear-side ceramic insulating layer) is between 0.06 mm and 0.45 mm;
wherein a withstand voltage per one ceramic insulating layer is AC 200 V or higher;
wherein the heater layer provides a heat resistance (heat removal performance) of between 0.4 and 0.8 K/kW to the electrostatic chuck heater.