CPC H01L 21/67703 (2013.01) [B60H 1/00014 (2013.01); B60H 1/00785 (2013.01); H01L 21/67294 (2013.01); H01L 21/6776 (2013.01)] | 20 Claims |
1. A control system, comprising:
a control apparatus arranged in a container of a wafer transport vehicle and configured to detect environmental parameters in the container of the wafer transport vehicle and regulate an internal environment of the container of the wafer transport vehicle; wherein the container of the wafer transport vehicle comprises a cabinet with a plurality of compartments, and wherein each of the plurality of compartments has a space configured to receive a wafer carrier, and wherein the control apparatus is received in the space of one of the plurality of compartments;
an onboard interface of the wafer transport vehicle in communication with the control apparatus; and
an outboard controller outside the wafer transport vehicle and in communication with the control apparatus;
wherein the onboard interface is configured to perform operations comprising:
receiving an information from the control apparatus;
providing communication with the outboard controller;
receiving an information from the outboard controller; and
controlling the control apparatus so as to regulate the internal environment of the container of the wafer transport vehicle;
wherein the outboard controller is configured to perform operations comprising:
receiving the environmental parameters detected by the control apparatus in the container of the wafer transport vehicle;
monitoring the internal environment of the container of the wafer transport vehicle through the control apparatus;
regulating the internal environment of the container of the wafer transport vehicle through the control apparatus; and
providing a notice to a driver of the wafer transport vehicle through the onboard interface.
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