US 12,230,524 B2
Control system for wafer transport vehicle and method for operating the same
Kai Ping Chan, Taichung (TW); Yen-Yu Chen, Taichung (TW); Yen Le Lee, Taichung (TW); and Ho Yueh Chen, Taichung (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Mar. 26, 2021, as Appl. No. 17/213,916.
Prior Publication US 2022/0310430 A1, Sep. 29, 2022
Int. Cl. H01L 21/67 (2006.01); B60H 1/00 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67703 (2013.01) [B60H 1/00014 (2013.01); B60H 1/00785 (2013.01); H01L 21/67294 (2013.01); H01L 21/6776 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A control system, comprising:
a control apparatus arranged in a container of a wafer transport vehicle and configured to detect environmental parameters in the container of the wafer transport vehicle and regulate an internal environment of the container of the wafer transport vehicle; wherein the container of the wafer transport vehicle comprises a cabinet with a plurality of compartments, and wherein each of the plurality of compartments has a space configured to receive a wafer carrier, and wherein the control apparatus is received in the space of one of the plurality of compartments;
an onboard interface of the wafer transport vehicle in communication with the control apparatus; and
an outboard controller outside the wafer transport vehicle and in communication with the control apparatus;
wherein the onboard interface is configured to perform operations comprising:
receiving an information from the control apparatus;
providing communication with the outboard controller;
receiving an information from the outboard controller; and
controlling the control apparatus so as to regulate the internal environment of the container of the wafer transport vehicle;
wherein the outboard controller is configured to perform operations comprising:
receiving the environmental parameters detected by the control apparatus in the container of the wafer transport vehicle;
monitoring the internal environment of the container of the wafer transport vehicle through the control apparatus;
regulating the internal environment of the container of the wafer transport vehicle through the control apparatus; and
providing a notice to a driver of the wafer transport vehicle through the onboard interface.