US 12,230,523 B2
Substrate processing apparatus and image capturing method
Tadashi Enomoto, Iwate (JP); Nao Akashi, Hokkaido (JP); Yutai Matsuhashi, Iwate (JP); and Masakazu Yamamoto, Iwate (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Aug. 17, 2022, as Appl. No. 17/889,624.
Claims priority of application No. 2021-133061 (JP), filed on Aug. 18, 2021.
Prior Publication US 2023/0154776 A1, May 18, 2023
Int. Cl. H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/68 (2006.01)
CPC H01L 21/67309 (2013.01) [H01L 21/681 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprising:
a chamber configured to accommodate a boat;
a transfer mechanism including an arm and a fork, provided inside the chamber, and configured to transfer a substrate;
a first camera configured to capture an image of a support column of the boat and the substrate;
a camera support inserted through an opening formed in a wall surface of the chamber, and configured to support the first camera; and
a driver configured to drive the camera support in order to move the first camera between a standby position and a measurement position.