US 12,230,520 B2
Protective component forming apparatus
Yoshinori Kakinuma, Tokyo (JP); Yoshikuni Migiyama, Tokyo (JP); and Makoto Saito, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Jun. 28, 2021, as Appl. No. 17/360,656.
Claims priority of application No. 2020-121641 (JP), filed on Jul. 15, 2020.
Prior Publication US 2022/0020607 A1, Jan. 20, 2022
Int. Cl. H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/6715 (2013.01) [H01L 21/67132 (2013.01); H01L 21/67253 (2013.01); H01L 21/6836 (2013.01); H01L 2221/68327 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A protective component forming apparatus that forms a layer of a resin with a desired thickness on one surface of a plate-shaped workpiece, the protective component forming apparatus comprising:
a chuck table that holds the workpiece with interposition of a sheet;
a tank that stores a liquid resin cured by an external stimulus;
a resin supply unit having a pump and a pipe that supply the liquid resin from the tank to the sheet held by the chuck table;
a pressing unit that causes the one surface of the workpiece to face the liquid resin supplied to one surface of the sheet held by the chuck table and presses the workpiece;
a curing unit that gives the external stimulus to the liquid resin pressed by the pressing unit and cures the liquid resin;
a resin inspecting part that senses change in viscosity of the liquid resin in association with change in quality of the liquid resin; and
an informing unit that transmits information to an operator,
wherein the resin inspecting part measures a flow rate of the liquid resin that flows in the pipe by the pump using a flowmeter, and
when a measurement value of the flow rate is outside an allowable range set in advance, the resin inspecting part informs that the measurement value of the flow rate is outside the allowable range by the informing unit, wherein the allowable range is a range indicating that the resin has not deteriorated during storage, and
wherein the apparatus also comprises a control unit, which comprises a processor and a memory, that has stored therein the allowable range of the flow rate, and wherein the control unit is configured and arranged to determine whether or not the measurement value of the flow rate is outside of the allowable range and, when the control unit determines that the measurement value is outside of the allowable range, the control unit causes the informing unit to inform a user that the measurement value is outside of the allowable range.