US 12,230,518 B2
Light irradiation type heat treatment apparatus
Nobuhiko Nishide, Kyoto (JP)
Assigned to SCREEN HOLDINGS CO., LTD., Kyoto (JP)
Filed by SCREEN HOLDINGS CO., LTD., Kyoto (JP)
Filed on Nov. 1, 2021, as Appl. No. 17/516,212.
Application 17/516,212 is a continuation of application No. 15/954,237, filed on Apr. 16, 2018, abandoned.
Claims priority of application No. 2017-081911 (JP), filed on Apr. 18, 2017.
Prior Publication US 2022/0051915 A1, Feb. 17, 2022
Int. Cl. H01L 21/67 (2006.01); G02B 5/02 (2006.01); H01L 21/687 (2006.01); H05B 3/00 (2006.01)
CPC H01L 21/67115 (2013.01) [G02B 5/0215 (2013.01); H01L 21/67248 (2013.01); H01L 21/6875 (2013.01); H05B 3/0047 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A heat treatment apparatus for heating a substrate by irradiating the substrate with light, comprising:
a chamber for receiving a substrate therein;
a holder for holding said substrate in said chamber;
a light irradiation part provided on one side of said chamber and for irradiating said substrate held by said holder with a flash of light; and
a light diffusion plate provided on an upper surface of a chamber window between said holder and said light irradiation part and having a size smaller than that of said substrate as seen in plan view, wherein
said light irradiation part includes a plurality of flash lamps arranged in a plane,
said plurality of flash lamps are disposed in a region larger than an area of said substrate as seen in plan view,
said light diffusion plate is disposed so that a central axis of said light diffusion plate coincides with a central axis of said substrate held by said holder,
said light diffusion plate is provided with a plurality of recessed or protruding spherical surfaces having the same radius of curvature,
said flashes of light emitted from said plurality of flash lamps and passing by the side of said light diffusion plate are transmitted through said chamber window to impinge upon a peripheral portion of said substrate, and
part of said flashes of light emitted from said plurality of flash lamps entering said light diffusion plate is diffused toward the peripheral portion of said substrate.