US 12,230,517 B2
Exhaust system and process equipment
Hsien-Chang Hsieh, Hsinchu (TW); Chun-Chih Lin, Hsinchu (TW); Tah-te Shih, Hsinchu (TW); Wen-Hsong Wu, Hsinchu (TW); Chune-Te Yang, Hsinchu (TW); and Yu-Jen Su, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on May 26, 2022, as Appl. No. 17/825,577.
Application 17/825,577 is a continuation of application No. 16/519,504, filed on Jul. 23, 2019, granted, now 11,348,811.
Application 16/519,504 is a continuation of application No. 15/694,161, filed on Sep. 1, 2017, granted, now 10,366,909, issued on Jul. 30, 2019.
Claims priority of provisional application 62/537,604, filed on Jul. 27, 2017.
Prior Publication US 2022/0285177 A1, Sep. 8, 2022
Int. Cl. F01N 13/08 (2010.01); F23J 13/02 (2006.01); F27D 17/00 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/67109 (2013.01) [F23J 13/02 (2013.01); F27D 17/002 (2013.01); H01L 21/67017 (2013.01); H01L 21/67103 (2013.01); F23J 2900/13001 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An exhaust structure comprising:
a piping section, wherein the piping section has a first inner diameter in a central region of the piping section;
an intake section connected to the piping section, wherein the intake section has the first inner diameter at a position of the intake section farthest from the central region;
an output section connected to the piping section, wherein the output section comprises a curved portion configured to change a direction of exhaust passing through the exhaust structure, and the output section has the first inner diameter at a position of the output section farthest from the central region; and
a plurality of smoothing layers configured to resist turbulence and condensation produced by a flow of one or more gases in the piping section.