US 12,230,480 B2
Detaching and installing device for gas distribution plate of etching machine, and etching machine
Ko Wei Chen, Hefei (CN); Li Meng, Hefei (CN); and Chien Chung Wang, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Oct. 22, 2021, as Appl. No. 17/508,862.
Application 17/508,862 is a continuation of application No. PCT/CN2021/098719, filed on Jun. 7, 2021.
Claims priority of application No. 202011206010.2 (CN), filed on Nov. 2, 2020.
Prior Publication US 2022/0134362 A1, May 5, 2022
Int. Cl. H01J 37/32 (2006.01); C23C 16/455 (2006.01)
CPC H01J 37/3244 (2013.01) [C23C 16/45565 (2013.01); H01J 37/32807 (2013.01); H01J 37/3288 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A detaching and installing device for a gas distribution plate of an etching machine, comprising a gripping member, a connecting member and a fixing member, wherein the fixing member is detachably connected to the gas distribution plate of the etching machine, and the gripping member and the fixing member are connected through the connecting member;
the gripping member is provided thereon with a gripping portion for grip by a user hand;
wherein the fixing member comprises at least one fixing portion detachably connected to the gas distribution plate;
wherein the fixing member extends in a first direction, and there are two fixing portions located respectively on two opposite ends of the fixing member in the first direction; the connecting member is connected with the fixing portions of the fixing member;
wherein the connecting member comprises a first connecting end and a second connecting end, the first connecting end is connected with the fixing portions of the fixing member and the second connecting end is connected with the gripping member;
wherein the first connecting end is in threaded connection with the fixing portions, a first outer thread is provided on the first connecting end, and the fixing portion is provided thereon with a first connecting hole in which a first inner thread engaged with the first outer thread is provided.