US 12,230,478 B2
Charged particle emission device, system, method, and program
Katsuyuki Takahashi, Iwate (JP); Chyon Hae Kim, Iwate (JP); Koichi Takaki, Iwate (JP); Katsuya Kubo, Iwate (JP); Yuki Kaneta, Iwate (JP); Shinichi Yamaguchi, Tokyo (JP); Isao Hiyoshi, Tokyo (JP); Ryuichi Takeuchi, Tokyo (JP); and Hidemi Nagata, Tokyo (JP)
Assigned to SHISHIDO ELECTROSTATIC, LTD., Tokyo (JP); and NATIONAL UNIVERSITY CORPORATION, IWATE UNIVERSITY, Morioka (JP)
Filed by SHISHIDO ELECTROSTATIC, LTD., Tokyo (JP); and NATIONAL UNIVERSITY CORPORATION, IWATE UNIVERSITY, Morioka (JP)
Filed on Jun. 8, 2022, as Appl. No. 17/835,345.
Application 17/835,345 is a continuation of application No. PCT/JP2020/045660, filed on Dec. 8, 2020.
Claims priority of application No. 2019-222358 (JP), filed on Dec. 9, 2019.
Prior Publication US 2022/0301820 A1, Sep. 22, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/3233 (2013.01) [H01J 2237/04 (2013.01); H01J 2237/06375 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A charged particle emission device configured to emit charged particles to a charged object for a predetermined emission time, the device comprising:
a pre-emission state detector configured to detect a pre-emission charged state which is a charged state of the charged object before charged particles are emitted;
an emission time generator configured to generate an emission time of charged particles to the charged object based on a past emission time of charged particles and a charged state of the charged object after the emission;
emission processor circuitry configured to emit charged particles to the charged object which is in the pre-emission charged state based on the emission time generated by the emission time generator;
a post-emission state detector configured to detect a post-emission charged state which is a charged state of the charged object after the charged particles are emitted;
machine learning processor circuitry configured to cause a predetermined machine learning model to learn a correspondence among the pre-emission charged state, the post-emission charged state, and the emission time generated by the emission time generator; and
completion determination processor circuitry configured to repeatedly operate the pre-emission state detector, the emission time generator, the emission processer circuitry, the post-emission state detector, and the machine learning processor circuitry until the machine learning model satisfies a predetermined learning completion condition, wherein
the learning completion condition is that an error between an emission time as output of the machine learning model and the emission time when the post-emission charged state reaches a target state or its vicinity is equal to or less than a predetermined value or a predetermined rate.