US 12,230,470 B2
Charged particle detector with gain element
Yongxin Wang, San Ramon, CA (US); and Rui-Ling Lai, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Feb. 25, 2020, as Appl. No. 16/800,946.
Claims priority of provisional application 62/810,905, filed on Feb. 26, 2019.
Prior Publication US 2020/0273664 A1, Aug. 27, 2020
Int. Cl. H01J 37/244 (2006.01); H01L 27/144 (2006.01); H01L 27/146 (2006.01); H01L 31/115 (2006.01); H01L 31/18 (2006.01)
CPC H01J 37/244 (2013.01) [H01L 27/1443 (2013.01); H01L 27/14658 (2013.01); H01L 31/115 (2013.01); H01L 31/18 (2013.01); H01J 2237/2441 (2013.01); H01J 2237/2448 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A detector for a charged particle beam apparatus, the detector comprising:
a sensing element; and
a gain element, wherein
the gain element includes a section in which, along a second direction perpendicular to a first direction, a region of first conductivity is provided adjacent to a region of second conductivity, and a region of third conductivity is provided adjacent to the region of second conductivity, the region of second conductivity being interposed between the region of first conductivity and the region of third conductivity;
the sensing element comprises a first layer including a region of fourth conductivity;
the sensing element and the gain element are aligned in the first direction such that a virtual line extending in the first direction passes through the first layer and one of the region of first conductivity, the region of second conductivity, or the region of third conductivity; and
the sensing element includes a section in which, along the first direction, the region of fourth conductivity is provided adjacent to an intrinsic region, and the region of second conductivity is provided adjacent to the intrinsic region.