US 12,230,469 B2
Apparatus for and method of local control of a charged particle beam
Albertus Victor Gerardus Mangnus, Eindhoven (NL); and Maikel Robert Goosen, Eindhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Dec. 30, 2021, as Appl. No. 17/566,518.
Application 17/566,518 is a continuation of application No. PCT/EP2020/065759, filed on Jun. 8, 2020.
Claims priority of application No. 19183767 (EP), filed on Jul. 2, 2019.
Prior Publication US 2022/0199355 A1, Jun. 23, 2022
Int. Cl. H01J 37/153 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/153 (2013.01) [H01J 37/28 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/1534 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A programmable phaseplate for a charged particle beam of an imaging system, the programmable phaseplate comprising:
plate member;
a plurality of apertures arranged in the plate member and configured to be disposed in a path of the charged particle beam such that each aperture of the plurality of apertures is configured to interact with a respective local portion of the charged particle beam; and
a plurality of aperture control members configured to separately control individual ones of the apertures or groups of the apertures to control an interaction of each aperture with the respective local portion of the charged particle beam and reduce lens aberration of a wavefront of the charged particle beam.