US 12,230,458 B2
MEMS relay
Jochen Reinmuth, Reutlingen (DE); and Matthew Lewis, Reutlingen (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Filed by Robert Bosch GmbH, Stuttgart (DE)
Filed on Jan. 9, 2023, as Appl. No. 18/151,568.
Claims priority of application No. 10 2022 200 337.3 (DE), filed on Jan. 13, 2022.
Prior Publication US 2023/0223208 A1, Jul. 13, 2023
Int. Cl. H01H 1/00 (2006.01); H01H 11/00 (2006.01)
CPC H01H 1/0036 (2013.01) [H01H 11/00 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A microelectromechanical system (MEMS) relay, comprising:
a movable switching element, on which a second switching surface is arranged in a first end section;
a substrate having a first switching surface arranged thereon, which is configured to interact with the second switching surface;
a switching electrode, which is configured for an application of an electrical switching voltage, the movable switching element being able to bring the second switching surface into contact with the first switching surface by way of an electrostatic force generated by the electrical switching voltage;
at least one second compensation surface arranged in an end section of the movable switching element opposite the second switching surface; and
a first compensation surface, which is configured to interact with the at least one second compensation surface and is galvanically connected to the first switching surface via a cable.