US 12,230,301 B2
Method of manufacturing a multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
Peter Hahn, Bangkok (TH); Kuen Chee Ee, Chino, CA (US); and Long Zhang, Winchester, CA (US)
Assigned to Magnecomp Corporation, Murrieta, CA (US)
Filed by Magnecomp Corporation, Murrieta, CA (US)
Filed on Mar. 14, 2022, as Appl. No. 17/694,495.
Application 17/694,495 is a continuation of application No. 17/107,729, filed on Nov. 30, 2020, granted, now 11,276,426.
Application 17/107,729 is a continuation of application No. 16/835,243, filed on Mar. 30, 2020, granted, now 10,854,225, issued on Dec. 1, 2020.
Application 16/835,243 is a continuation of application No. 16/443,690, filed on Jun. 17, 2019, granted, now 10,607,642, issued on Mar. 31, 2020.
Application 16/443,690 is a continuation of application No. 15/055,618, filed on Feb. 28, 2016, granted, now 10,325,621, issued on Jun. 18, 2019.
Application 15/055,618 is a continuation of application No. 14/672,122, filed on Mar. 28, 2015, granted, now 9,330,698, issued on May 3, 2016.
Application 14/672,122 is a continuation in part of application No. 14/566,666, filed on Dec. 10, 2014, granted, now 9,330,694, issued on May 3, 2016.
Application 14/566,666 is a continuation in part of application No. 14/214,525, filed on Mar. 14, 2014, granted, now 9,117,468, issued on Aug. 25, 2015.
Application 14/672,122 is a continuation in part of application No. 14/214,525, filed on Mar. 14, 2014, granted, now 9,117,468, issued on Aug. 25, 2015.
Claims priority of provisional application 62/085,471, filed on Nov. 28, 2014.
Claims priority of provisional application 62/061,074, filed on Oct. 7, 2014.
Claims priority of provisional application 61/877,957, filed on Sep. 14, 2013.
Claims priority of provisional application 61/802,972, filed on Mar. 18, 2013.
Prior Publication US 2022/0199114 A1, Jun. 23, 2022
Int. Cl. G11B 5/48 (2006.01); G11B 5/596 (2006.01); H10N 30/045 (2023.01); H10N 30/063 (2023.01); H10N 30/067 (2023.01); H10N 30/072 (2023.01); G11B 5/55 (2006.01)
CPC G11B 5/4873 (2013.01) [G11B 5/4806 (2013.01); G11B 5/483 (2015.09); G11B 5/596 (2013.01); H10N 30/045 (2023.02); H10N 30/063 (2023.02); H10N 30/067 (2023.02); H10N 30/072 (2023.02); G11B 5/5552 (2013.01); Y10T 29/42 (2015.01)] 11 Claims
OG exemplary drawing
 
1. A method of manufacturing a piezoelectric microactuator assembly, the method comprising:
forming a top electrode layer onto a first face of a PZT element;
placing at least two separate portions of a mask at different locations over a top surface of the top electrode layer;
applying a constraint layer over the mask, wherein the constraint layer is smaller than the top electrode layer formed on the PZT element;
removing the mask and leaving the constraint layer, exposing at least two portions of the top electrode and creating an exposed shelf from any of the at least two exposed portions of the top electrode that are uncovered by the constraint layer;
forming a bottom electrode layer onto a bottom face of the PZT element opposite the top electrode layer; and
polarizing the PZT element to form an active piezoelectric layer.