| CPC G06T 7/001 (2013.01) [G01J 1/42 (2013.01); G01J 1/44 (2013.01); G01N 21/958 (2013.01); G02B 27/0172 (2013.01); G06T 7/80 (2017.01); G06T 7/90 (2017.01); H04N 23/56 (2023.01); H04N 23/74 (2023.01); H04N 23/90 (2023.01); G01J 2001/4247 (2013.01); G01N 2021/9583 (2013.01); G02B 2027/0112 (2013.01); G02B 2027/0118 (2013.01); G02B 2027/0138 (2013.01); G02B 2027/014 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/30108 (2013.01)] | 20 Claims |
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1. An optical device metrology system, comprising:
a stage configured to move a tray along a stage path;
a first subsystem comprising:
a first body having a first opening and a second opening to allow the stage to move through the first opening and the second opening,
a first light engine positioned within the first body and mounted above the stage path, the first light engine configured to direct first light beams toward the stage path, the first light engine comprising:
a first illuminator, the first illuminator comprising a first light source and a first projection structure,
a first lens positioned between the first illuminator and the stage path along an optical path, wherein the first projection structure and the first lens are oriented perpendicularly to the stage path, and
one or more two-dimensional Galvano mirrors configured to turn the first light beams along a 90 degree turn toward the stage path, and
a first detector positioned within the first body and mounted above the stage path to receive first projected light beams projected upwardly from the stage path, and
a second detector positioned within the first body and mounted below the stage path to receive second projected light beams projected downwardly from the stage path; and
a second subsystem comprising:
a second body having a first opening and a second opening to allow the stage to move through the first opening and the second opening of the second body,
a second light engine positioned within the second body and mounted above the stage path, the second light engine configured to direct second light beams toward the stage path, and
a face illumination detector configured to receive third projected light beams projected upwardly from the stage path; and
a controller in communication with the stage, the first subsystem, and the second subsystem, the controller comprising instructions that, when executed, cause:
the stage to position an optical device within the first subsystem to align the optical device with the first detector and the second detector of the first subsystem;
the first light engine to direct first light beams toward the optical device, the directing comprising turning the first light beams along a 90 degree turn toward the stage path;
the first detector to capture a plurality of first images of first projected light beams that project from the optical device;
the second detector to capture a plurality of second images of second projected light beams that project from the optical device;
processing of one or more of the plurality of first images or the plurality of second images to determine a plurality of first metrics of the optical device;
the stage to position the optical device within the second subsystem to align the optical device with the face illumination detector of the second subsystem;
the second light engine to direct second light beams toward the optical device;
the face illumination detector to capture a plurality of third images of third projected light beams that project from the optical device;
processing of the plurality of third images to determine one or more second metrics of the optical device, the one or more second metrics including a display leakage metric.
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