CPC G06T 7/0004 (2013.01) [G06T 1/0007 (2013.01); G06T 3/4053 (2013.01); G06T 5/20 (2013.01); G06T 5/70 (2024.01); G06T 11/00 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01)] | 20 Claims |
1. A super resolution scanning electron microscope (SEM) image implementing device comprising:
a processor configured to execute machine-readable instructions to cause the device to crop a low resolution SEM image to generate a first cropped image and a second cropped image, the low resolution SEM image including an image of at least one of fins of a semiconductor device, shallow trench isolations of the semiconductor device, or gate lines of the semiconductor device,
to upscale the first cropped image and the second cropped image to generate a first upscaled image and a second upscaled image using a ground truth image having high-resolution and corresponding to the first and second cropped image, respectively, and
to cancel noise from the first upscaled image and the second upscaled image to generate a first noise canceled image and a second noise canceled image, wherein
the noise canceling includes canceling noise based on a deep learning network trained on a layout of the semiconductor device, the layout corresponding to a field of view of the SEM image.
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